Neptune 6
6kW 2.45Ghz Microwave
Continuous wave/Pulsed
Magnetron based (Solid state optional)
1-4 inch substrate diameter
3-axis positioning
DC Biasing (optional)
Made of high purity molybdenum
316L stainless steel chamber
Interior wall linings - silicon carbide, molybdenum, tungsten, etc. (optional)
Loadlock chamber accessory (optional)
100% Hermetically sealed
1x10^-10 mbar minimum vacuum
Liquid cooled walls
>6 accessory ports
3 stage vacuum system - Dry scroll, turbomolecular, ion pump
Neptune 15
15kW 2.45Ghz Microwave
Continuous wave/Pulsed
Magnetron based (Solid state optional)
1-5 inch substrate diameter
3-axis positioning
DC Biasing (optional)
Made of high purity molybdenum
316L stainless steel chamber
Interior wall linings - silicon carbide, molybdenum, tungsten, etc. (optional)
Loadlock chamber accessory (optional)
100% Hermetically sealed
1x10^-10 mbar minimum vacuum
Liquid cooled walls
>6 accessory ports
3 stage vacuum system - Dry scroll, turbomolecular, ion pump
Neptune 100
100kW 915Mhz Microwave
Continuous wave/Pulsed
Magnetron based (Solid state optional)
6-10 inch substrate diameter
3-axis positioning
DC Biasing (optional)
Made of high purity molybdenum
316L stainless steel chamber
Interior wall linings - silicon carbide, molybdenum, tungsten, etc. (optional)
Loadlock chamber accessory (optional)
100% Hermetically sealed
1x10^-10 mbar minimum vacuum
Liquid cooled walls
>6 accessory ports
3 stage vacuum system - Dry scroll, turbomolecular, ion pump
Neptune 200
200kW 915Mhz Microwave
Continuous wave/Pulsed
Magnetron based (Solid state optional)
8-12 inch substrate diameter
3-axis positioning
DC Biasing (optional)
Made of high purity molybdenum
316L stainless steel chamber
Interior wall linings - silicon carbide, molybdenum, tungsten, etc. (optional)
Loadlock chamber accessory (optional)
100% Hermetically sealed
1x10^-10 mbar minimum vacuum
Liquid cooled walls
>6 accessory ports
3 stage vacuum system - Dry scroll, turbomolecular, ion pump
